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Glossary
Semester (Sem)
1First Semester
2Second Semester
AAnnual course
Educational activities
BIdentifying activities
Language
Course completely offered in italian
Course completely offered in english
--Not available
Innovative teaching
The credits shown next to this symbol indicate the part of the course CFUs provided with Innovative teaching.
These CFUs include:
  • Subject taught jointly with companies or organizations
  • Blended Learning & Flipped Classroom
  • Massive Open Online Courses (MOOC)
  • Soft Skills
Course Details
Context
Academic Year 2020/2021
School School of Industrial and Information Engineering
Name (Master of Science degree)(ord. 270) - MI (486) Engineering Physics
Track F2B - Nanophysics and Nanotechnology
Programme Year 2

Course Details
ID Code 055559
Course Title ADVANCED MICRO AND NANOFABRICATION TECHNOLOGIES
Course Type Mono-Disciplinary Course
Credits (CFU / ECTS) 5.0
Semester First Semester
Course Description The objective of the course is to introduce the student to the theory and technology of micro- and nano-fabrication, providing her/him with the essential knowledge and experimental skills on the basic and advanced processing techniques. A section of the course is devoted to the film and heterostructure realization, starting from basic knowledge of the vacuum and surface properties, moving to deposition techniques (thermal evaporation, laser ablation, sputtering, chemical deposition), whereas a second section is focused on the realization of devices by conventional (optical, electron-beam) and advanced (maskless, UV, X-ray) lithography, as well as etching techniques. The experimental activity is carried out at the Polifab micro- and nano-technology center of the Politecnico di Milano. The main goal of the course is to provide the student with the ability to design and realize a conventional process flow for the fabrication of simple electronic and spintronic devices.
Scientific-Disciplinary Sector (SSD)
Educational activities SSD Code SSD Description CFU
B
FIS/01
EXPERIMENTAL PHYSICS
5.0

Schedule, add and removeAlphabetical groupLecturer(s)LanguageTeaching Assignment Details
From (included)To (excluded)
---AZZZZCantoni Matteo
manifesti v. 3.9.3 / 3.9.3
Area Servizi ICT
24/04/2025